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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
11827988
Issue Dt:
11/28/2023
Application #:
17891025
Filing Dt:
08/18/2022
Publication #:
20220389591
Pub Dt:
12/08/2022
Inventors:
Xiaogen YIN, Anyan DU, Huilong ZHU, Chen LI, Yongkui ZHANG
Title:
HIGH-PRECISION ETCHING METHOD
Assignment: 1
Reel/Frame:
060849/0512Recorded: 08/18/2022Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
ZHU, HUILONG
Exec Dt:
07/15/2020
YIN, XIAOGEN
Exec Dt:
07/15/2020
LI, CHEN
Exec Dt:
07/15/2020
DU, ANYAN
Exec Dt:
07/15/2020
ZHANG, YONGKUI
Exec Dt:
07/17/2020
Assignee:
THE INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
NO. 3 BEITUCHENG WEST ROAD
CHAOYANG DISTRICT
BEIJING, CHINA 100029
Correspondent:
DAVIS WRIGHT TREMAINE LLP
920 FIFTH AVENUE
SUITE 3300
SEATTLE, WA 98104-1610
Assignment: 2
Reel/Frame:
064684/0777Recorded: 08/23/2023Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
ZHU, HUILONG
Exec Dt:
08/22/2023
YIN, XIAOGEN
Exec Dt:
08/22/2023
LI, CHEN
Exec Dt:
08/22/2023
DU, ANYAN
Exec Dt:
08/22/2023
ZHANG, YONGKUI
Exec Dt:
08/22/2023
Assignee:
THE INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
NO. 3 BEITUCHENG WEST ROAD, CHAOYANG DISTRICT
BEIJING, CHINA 100029
Correspondent:
DAVIS WRIGHT TREMAINE LLP
920 FIFTH AVENUE
SUITE 3300
SEATTLE, WA 98104-1610

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