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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
01/09/2024
Application #:
18048102
Filing Dt:
10/20/2022
Publication #:
Pub Dt:
03/02/2023
Inventors:
Kazuya DOBASHI, Kenji SEKIGUCHI, Masato NAKAJO, Kyoko IKEDA, Tsunenaga NAKASHIMA et al
Title:
SUBSTRATE CLEANING METHOD, PROCESSING CONTAINER CLEANING METHOD, AND SUBSTRATE PROCESSING DEVICE
Assignment: 1
Reel/Frame:
061729/0935Recorded: 10/20/2022Pages: 38
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
05/14/2021
Exec Dt:
05/17/2021
Exec Dt:
05/12/2021
Exec Dt:
05/18/2021
Exec Dt:
05/12/2021
Exec Dt:
05/12/2021
Exec Dt:
05/12/2021
Assignee:
3-1, AKASAKA 5-CHOME, MINATO-KU,
TOKYO, JAPAN 107-6325
Correspondent:
IPUSA, P.L.L.C
1054 31ST STREET, N.W.
SUITE 400
WASHINGTON, DC 20007

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