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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
01/09/2024
Application #:
17014684
Filing Dt:
09/08/2020
Publication #:
Pub Dt:
12/24/2020
Inventors:
Takeshi YASUI, Katsunori FUNAKI, Yasutoshi TSUBOTA, Koichiro HARADA
Title:
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
Assignment: 1
Reel/Frame:
053813/0806Recorded: 09/18/2020Pages: 14
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
08/20/2020
Exec Dt:
09/04/2020
Exec Dt:
09/04/2020
Exec Dt:
09/04/2020
Assignee:
3-4, KANDAKAJI-CHO
SUITE 750
TOKYO, JAPAN 1010045
Correspondent:
EDELL SHAPIRO & FINNAN LLC
9801 WASHINGTONIAN BLVD.
SUITE 750
GAITHERSBURG, MD 20878

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