Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/20/2024
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Application #:
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17185408
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Filing Dt:
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02/25/2021
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Publication #:
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Pub Dt:
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06/17/2021
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Inventors:
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Tokunobu AKAO, Hitoshi MURATA, Akinori TANAKA, Masaaki UENO
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Title:
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Substrate Temperature Sensor, Substrate Retainer and Substrate Processing Apparatus
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-4, KANDAKAJI-CHO |
| CHIYODA-KU |
| TOKYO, JAPAN 1010045 |
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| EDELL SHAPIRO & FINNAN LLC |
| 9801 WASHINGTONIAN BLVD. |
| SUITE 750 |
| GAITHERSBURG, MD 20878 |
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05/06/2024 04:57 AM
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