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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
02/20/2024
Application #:
17191841
Filing Dt:
03/04/2021
Publication #:
Pub Dt:
09/16/2021
Inventors:
Yosuke HANAWA, Dai UEDA
Title:
Substrate Processing Liquid for Etching a Metal Layer, Substrate Processing Method and Substrate Processing Apparatus
Assignment: 1
Reel/Frame:
055494/0524Recorded: 03/04/2021Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
02/26/2021
Exec Dt:
02/26/2021
Assignee:
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME
HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI
KYOTO, JAPAN 602-8585
Correspondent:
OSTROLENK FABER LLP
845 THIRD AVENUE
8TH FLOOR
NEW YORK, NY 10022

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