Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/05/2024
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Application #:
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17994763
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Filing Dt:
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11/28/2022
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Publication #:
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Pub Dt:
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05/04/2023
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Inventors:
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Teruo YOSHINO, Tadashi TAKASAKI, Naofumi OHASHI
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Title:
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SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-4, KANDAKAJI-CHO, CHIYODA-KU |
| TOKYO, JAPAN 1010045 |
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| EDELL, SHAPIRO & FINNAN, LLC |
| 9801 WASHINGTONIAN BOULEVARD |
| SUITE 750 |
| GAITHERSBURG, MD 20878 |
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