Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/09/2024
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Application #:
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16936110
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Filing Dt:
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07/22/2020
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Publication #:
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Pub Dt:
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02/04/2021
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Inventors:
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Yuxing Zhang, Kalyanjit Ghosh, Juan Carlos Rocha-Alvarez, Nitin Pathak, Tuan A. Nguyen et al
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Title:
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SEMICONDUCTOR PROCESSING CHAMBERS AND METHODS FOR CLEANING THE SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3050 BOWERS AVENUE |
SANTA CLARA, CALIFORNIA 95054 |
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KILPATRICK TOWNSEND & STOCKTON LLP |
1100 PEACHTREE STREET, SUITE 2800 |
ATLANTA, GA 30309 |
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05/09/2024 02:47 AM
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