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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
04/16/2024
Application #:
18317368
Filing Dt:
05/15/2023
Publication #:
Pub Dt:
09/07/2023
Inventors:
Pei-Cheng Hsu, Chun-Fu Yang, Ta-Cheng Lien, Hsin-Chang Lee
Title:
Method Of Critical Dimension Control By Oxygen And Nitrogen Plasma Treatment In Euv Mask
Assignment: 1
Reel/Frame:
063642/0270Recorded: 05/15/2023Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
11/04/2019
Exec Dt:
11/04/2019
Exec Dt:
11/04/2019
Exec Dt:
11/04/2019
Assignee:
8, LI-HSIN RD. 6
HSINCHU SCIENCE PARK
HSINCHU, TAIWAN 300-78
Correspondent:
HAYNES AND BOONE, LLP (24061) IP SECTION
2323 VICTORY AVENUE
SUITE 700
DALLAS, TX 75219

Search Results as of: 10/31/2024 07:07 PM
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