Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/16/2024
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Application #:
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18114805
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Filing Dt:
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02/27/2023
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Publication #:
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Pub Dt:
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07/27/2023
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Inventors:
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Chansyun David YANG, Keh-Jeng CHANG, Chan-Lon YANG
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Title:
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LASER INTERFERENCE FRINGE CONTROL FOR HIGHER EUV LIGHT SOURCE AND EUV THROUGHPUT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK |
| HSINCHU, TAIWAN |
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| MCDERMOTT WILL & EMERY LLP |
| 500 NORTH CAPITOL STREET, NW |
| WASHINGTON, DC 20001 |
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05/15/2024 01:37 PM
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