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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
04/16/2024
Application #:
16978221
Filing Dt:
09/04/2020
Publication #:
Pub Dt:
01/14/2021
Inventors:
Eiji FUKATSU, Koji HASHIMOTO, Hiroyuki FUJIKI, Masafumi INOUE
Title:
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Assignment: 1
Reel/Frame:
053692/0829Recorded: 09/04/2020Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
08/18/2020
Exec Dt:
08/18/2020
Exec Dt:
08/24/2020
Exec Dt:
08/19/2020
Assignee:
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME
HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI
KYOTO, JAPAN 602-8585
Correspondent:
OSTROLENK FABER LLP
845 THIRD AVENUE
8TH FLOOR
NEW YORK, NY 10022

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