Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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09/07/1982
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Application #:
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06183710
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Filing Dt:
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09/03/1980
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Inventors:
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HIROYASU TOYODA, HIROYOSHI KOMIYA, HIDEAKI ITAKURA
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Title:
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A HIGH SELECTIVITY PLASMA ETCHING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| SUGHRUE, ROTHWELL, MION |
| ZINN & MACPEAK |
| 1776 K ST., N. W. |
| WASHINGTON, DC 20006 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| 2-3, MARUNOUCHI 2-CHOME, CHIYODA-KU |
| TOKYO, JAPAN 100 |
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| DAVID J. CUSHING |
| SUGHRUE, MION, ZINN, MACPEAK & SEAS |
| 2100 PENNSYLVANIA AVENUE, N.W. |
| WASHINGTON, DC 20037-3202 |
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