Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/09/1983
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Application #:
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06299703
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Filing Dt:
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09/08/1981
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Inventors:
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HARTMUT F. KOLBE, FRANK A. SCHWARZBACH
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Title:
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MASK FOR IMAGING A PATTERN ON A PHOTORESIST LAYER, METHOD OF MAKING SAID MASK, AND USE THEREOF IN A PHOTOLITHOGRAPHIC PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| JHON J. GOODWIN |
| IBM CORPORATION |
| YORKTONW PATENT OPERATIONS |
| P. O. BOX 218 |
| YORKTOWN HEIGHTS, NEW YORK 10598 |
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