Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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10/11/1983
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Application #:
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06278448
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Filing Dt:
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06/29/1981
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Inventors:
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HANS P. KLEINKNECHT, WILLIAM E. HAM, HEINRICH MEIER
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Title:
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OPTICAL MEASUREMENTS OF FINE LINE PARAMETERS IN INTEGRATED CIRCUIT PROCESSES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| A CORP. OF DE. |
| PRINCETON, NEW JERSEY 08540 |
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| JOSEPH D. LAZAR |
| RCA CORP., PAT. OPERS. |
| P. O. BOX 432 |
| PRINCETON, NJ 08540 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2401 PALM BAY ROAD, N.E. |
| PALM BAY, FLORIDA 32905 |
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| FISH & RICHARDSON P.C. |
| TIMOTHY A. FRENCH |
| 225 FRANKLIN STREET |
| BOSTON, MA 02110-2804 |
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Assignment:
3
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SECURITY INTEREST (SEE DOCUMENT FOR DETAILS).
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| 11 MADISON AVENUE |
| NEW YORK, NEW YORK 10010 |
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| CRAVATH, SWAINE & MOORE |
| CHIANN BAO |
| WORLDWIDE PLAZA, 44TH FLOOR |
| 825 EIGHTH AVENUE |
| NEW YORK, NY 10019 |
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