Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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11/15/1983
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Application #:
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06250375
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Filing Dt:
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04/02/1981
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Inventors:
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BARRY GELERNT, C. WALLACE WANG
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Title:
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END-POINT DETECTION IN PLASMA ETCHING OF PHOSPHOSILICATE GLASS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| MAIN AVE. |
| NORWALK, CONNECTICUT 06856 |
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| THOMAS P. MURPHY |
| THE PERKIN-ELMER CORPORATION |
| MAIN AVENUE |
| NORWALK, CT 06856 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| JAMES M. HESLIN |
| TOWNSEND AND TOWNSEND |
| 379 LYTTON AVENUE |
| PALO ALTO, CA 94301 |
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