Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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02/14/1984
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Application #:
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06298416
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Filing Dt:
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09/01/1981
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Inventors:
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ALAN R. REINBERG, GEORGE N. STEINBERG, CHARLES B. ZAROWIN
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Title:
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INDUCTIVELY COUPLED DISCHARGE FOR PLASMA ETCHING AND RESIST STRIPPING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| MAIN AVE. |
| A CORP. OF NY. |
| NORWALK, CONNECTICUT 06856 |
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| THOMAS P. MURPHY |
| THE PERKIN-ELMER CORP., MS#73 |
| MAIN AVENUE |
| NORWALK, CT 06856 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| JAMES M. HESLIN |
| TOWNSEND AND TOWNSEND |
| 379 LYTTON AVENUE |
| PALO ALTO, CA 94301 |
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