Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/27/1984
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Application #:
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06332973
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Filing Dt:
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12/21/1981
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Inventors:
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SHIGERU KOMATSU, MICHIO NAKAMURA
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Title:
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METHOD OF FORMING DOPED POLYCRSTALLINE SILICON PATTERN BY SELECTIVE IMPLATATION AND PLASMA ETCHING OF UNDOPED REGIONS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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72 HORIKAWA-CHO, SAIWAI-KU, |
A CORP. OF JAPAN |
KAWASAKI-SHI, JAPAN |
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TIPTON D. JENNINGS |
FINNEGAN, HENDERSON, ET AL |
1775 K ST., N.W. |
WASHINGTON, D.C. 20006 |
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