Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/31/1984
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Application #:
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06467298
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Filing Dt:
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02/17/1983
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Inventors:
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MASAHIRO ABE, TOSHIO YONEZAWA, MASAHARU AOYAMA, TAKASHI AJIMA
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Title:
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SYSTEM FOR ETCHING A METAL FILM ON A SEMICONDUCTOR WAFER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| 72 HORIKAWA-CHO, SAIWAI-KU, |
| KAWASAKI-SHI,, JAPAN |
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| FINNEGAN, HENDERSON, FARABOW, |
| GARRETT & DUNNER |
| 1775 K ST., N. W. |
| WASHINGTON, DC 20006 |
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