Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/13/1984
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Application #:
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06576143
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Filing Dt:
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02/02/1984
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Inventors:
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TSUTOMU TSUKADA, ETSUO WANI, KATSUMI UKAI, TERUO SAITOH
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Title:
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DRY ETCHING APPARATUS COMPRISING ETCHING CHAMBERS OF DIFFERENT ETCHING RATE DISTRIBUTIONS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| 8-1, YOTSUYA 5-CHOME, |
| FUCHU-SHI, TOKYO 183, JAPAN |
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| LAFF, WHITESEL, CONTE AND SARET |
| JOHN HANCOCK CENTER |
| CHICAGO, IL 60611 |
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