Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/04/1986
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Application #:
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06605088
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Filing Dt:
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04/30/1984
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Inventors:
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DINESH A. BADAMI, MARK C. HAKEY, HOLGER MORITZ
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Title:
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PROCESS FOR DELINEATING PHOTORESIST LINES AT PATTERN EDGES ONLY USING IMAGE REVERSAL COMPOSITION WITH DIAZOQUINONE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| MARK F. CHARDURJIAN |
| IBM CORP., PAT. OPERATIONS |
| 1755 S. JEFF. DAVIS HWY., STE. 605 |
| ARLINGTON, VA 22202 |
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