Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/18/1986
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Application #:
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06582259
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Filing Dt:
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02/22/1984
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Inventors:
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TETSUJI ARAI, YOSHIKI MIMURA
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Title:
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HEATING METHOD OF SEMICONDUCTOR WAFER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| ZIEMS & WALTER |
| 6862 ELM ST., P.O. BOX 1055 |
| MC LEAN, VA 22101 |
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