Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/20/1986
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Application #:
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06672763
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Filing Dt:
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11/19/1984
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Inventors:
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HISASHI NAKANE, AKIRA YOKOTA, MITSUO YABUTA, MINORU TSUDA, WATARU ISHII
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Title:
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METHOD FOR FINE PATTERN FORMATION ON A PHOTORESIST
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| 150 NAKAMARUKO NAKAHARA-KU KAWASAKI-SHI |
| KANAGAWA-KEN, JAPAN |
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| ARMSTRONG, NIKAIDO, MARMELSTEIN & |
| KUBOVCIK |
| 1725 K ST., N.W., STE. 912 |
| WASHINGTON, DC 20006 |
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