Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/29/1986
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Application #:
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06730969
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Filing Dt:
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05/06/1985
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Inventors:
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LEE CHEN, GANGADHARA S. MATHAD
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Title:
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MONITORING TECHNIQUE FOR PLASMA ETCHING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| A CORP OF NY |
| ARMONK, NEW YORK 10504 |
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| DOUGLAS A. LASHMIT |
| IBM CORP., RT. #52 |
| DEPT., 901, BLDG., 300-482 |
| HOPEWELL JUNCTION, NY 12533 |
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