Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/14/1986
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Application #:
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06360027
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Filing Dt:
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03/19/1982
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Inventors:
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TUNG J. CHUANG, FRANCES A. HOULE, KURT E. PETERSEN
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Title:
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RAPID ETCHING METHOD FOR SLICON BY SF6 GAS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| JOSEPH E. KIENINGER |
| IBM PATENT OPERATIONS (951/123) |
| 5600 COTTLE ROAD |
| SAN JOSE, CA 95193 |
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