Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/03/1987
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Application #:
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06664965
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Filing Dt:
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10/26/1984
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Inventors:
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HIROKO NAGASAKA, NAWOTO MOTEGI
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Title:
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DRY ETCHING METHOD OF COMPOUND SEMICONDUCTOR
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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72 HORIKAWA-CHO, SAIWAI-KU, |
A CORP. OF JAPAN |
KAWASAKI-SHI, JAPAN |
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OBLON, FISHER, SPIVAK, MC CLELLAND |
& MAIER, CRYSTAL SQUARE FIVE, STE. 400 |
1755 SOUTH JEFF. DAVIS HWY. |
ARLINGTON,VA 22202 |
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