Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/26/1987
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Application #:
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06774721
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Filing Dt:
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09/11/1985
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Inventors:
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MAKOTO SEKINE, HARUO OKANO, YASUHIRO HORIIKE
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Title:
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DRY-ETCHING METHOD AND APPARATUS THEREFOR
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| 72 HORIKAWA-CHO, SAIWAI-KU |
| KAWASAKI-SHI, JAPAN |
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| OBLON, FISHER, SPIVAK, MCCLELLAND |
| & MAIER, CRYSTAL SQ., FIVE, STE. 400 |
| 1755 S. JEFF DAVIS HWY., |
| ARLINGTON, VA 22202 |
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