Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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10/06/1987
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Application #:
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06898081
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Filing Dt:
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08/20/1986
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Inventors:
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WOLFGANG EHRFELD, ASIM MANER, DIETRICH MUNCHMEYER
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Title:
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METHOD FOR PRODUCING DEEP-ETCH, X-RAY LITHOGRAPHY MASKS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| PATENTABTEILUNG, WEBERSTRASSE 5 |
| D-7500 KARLSRUHE 1, GERMANY |
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| SPENCER & FRANK |
| 1111 - 19TH ST., N. W. |
| WASHINGTON, DC 20036 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| PATENTABTEILUNG, WEBERSTRASSE 5 |
| D-7500 KARLSRUHE 1, GERMANY |
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| SPENCER & FRANK |
| 1111 - 19TH ST., N. W. |
| WASHINGTON, DC 20036 |
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