Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/05/1988
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Application #:
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06789366
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Filing Dt:
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10/22/1985
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Inventors:
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YOSHIHIDE KATO, KEI KIRITA, TOSHIAKI SHINOZAKI, FUMIAKI SHIGEMITSU, KINYA USUDA et al
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Title:
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METHOD AND APPARATUS FOR FORMING RESIST PATTERN
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| 72 HORIKAWA-CHO, SAIWAI-KU, |
| KAWASAKI-SHI, JAPAN |
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| OBLON, FISHER, SPIVAK, |
| MC CLELLAND & MAIER |
| CRYSTAL SQUARE 5, SUITE 400 |
| 1755 S. JEFF. DAVIS HWY. |
| ARLINGTON, VA 22202 |
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