Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/14/1989
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Application #:
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07073978
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Filing Dt:
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07/15/1987
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Inventors:
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HIROYUKI SAKAI, KAZUTOSHI YOSHIOKA, KIMIHARU MATSUMURA, KEISUKE SHIGAKI, TERUHIKO ONOE et al
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Title:
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METHOD OF ASHING LAYERS, AND APPARATUS FOR ASHING LAYERS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| OBLON, FISHER, SPIVAK, MC CLELLAND & |
| MAIER, CRYSTAL SQUARE FIVE - STE. 400 |
| 1755 SOUTH JEFF. DAVIS HWY. |
| ARLINGTON, VA 22202 |
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