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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
03/28/1989
Application #:
07110253
Filing Dt:
10/20/1987
Inventors:
KATSUMI UKAI, TSUTOMU TSUKADA, KOUJI IKEDA, TOSHIO ADACHI
Title:
SINGLE SLICE PROCESSING APPARATUS WITH BATCH PROCESSING LOAD-LOCK CHAMBER FOR HEATING THE SUBSTRATES AND PLASMA PROCESSING
Assignment: 1
Reel/Frame:
004810/0698Recorded: 10/20/1987Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST.
Assignors:
Exec Dt:
09/03/1987
Exec Dt:
09/03/1987
Exec Dt:
09/03/1987
Exec Dt:
09/03/1987
Assignee:
Correspondent:
POLLOCK, VANDE SANDE & PRIDDY
POST OFFICE BOX 19088
WASHINGTON, DC 20036

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