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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
4835114
Issue Dt:
05/30/1989
Application #:
07016567
Filing Dt:
02/19/1987
Inventors:
AKIHIKO SATOU, TADAO KUSAKA, SHIGEO TOMIYAMA, KOUZI AOKI, ICHIRO GYOBU, KIMIO MURAMATSU et al
Title:
METHOD FOR LPCVD OF SEMICONDUCTORS USING OIL FREE VACUUM PUMPS
Assignment: 1
Reel/Frame:
005000/0402Recorded: 01/11/1989Pages: 1
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST.
Assignors:
MURAMATSU, KIMIO
Exec Dt:
04/16/1987
SAKAMOTO, HIROAKI
Exec Dt:
04/16/1987
UEDA, SHINJIROO
Exec Dt:
04/16/1987
MASE, MASAHIRO
Exec Dt:
04/16/1987
NAGAOKA, TAKASHI
Exec Dt:
04/16/1987
Assignees:
HITACHI, LTD.
TOKYO 100, JAPAN
HITACHI TOKYO ELECTRONICS CO.
OHME-SHI, TOKYO, JAPAN
Correspondent:
ANTONELLI, TERRY & WANDS
SUITE 600
1919 PENNSYLVANIA AVENUE, N.W.
WASHINGTON, DC 20006
Assignment: 2
Reel/Frame:
005000/0403Recorded: 01/11/1989Pages: 1
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST.
Assignors:
SATOU, AKIHIKO
Exec Dt:
04/16/1987
KUSAKA, TADAO
Exec Dt:
04/16/1987
TOMIYAMA, SHIGEO
Exec Dt:
04/16/1987
AOKI, KOUZI
Exec Dt:
04/16/1987
GYOBU, ICHIRO
Exec Dt:
04/16/1987
Assignees:
HITACHI, LTD.
TOKYO 100, JAPAN
HITACHI TOKYO ELECTRONICS CO.
OHME-SHI, TOKYO, JAPAN
Correspondent:
ANTONELLI, TERRY & WANDS
SUITE 600
1919 PENNSYLVANIA AVENUE, N.W.
WASHINGTON, DC 20006

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