Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/11/1989
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Application #:
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07130573
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Filing Dt:
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12/09/1987
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Inventors:
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JOHN H. KELLER, GARY S. SELWYN, JYOTHI SINGH
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Title:
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PLASMA AMPLIFIED PHOTOELECTRON PROCESS ENDPOINT DETECTION APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| WILLIAM T. ELLIS |
| IBM, DEPT. 901, B/300-482 |
| HOPEWELL JUNCTION, NY 12533 |
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