Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/22/1989
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Application #:
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07100148
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Filing Dt:
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09/23/1987
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Inventors:
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AKIHISA YOSHIDA, KENTARO SETSUNE, TAKASHI HIRAO
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Title:
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PLASMA PROCESSING APPARATUS FOR LARGE AREA ION IRRADIATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| SPENCER & FRANK |
| 1111 - 19TH STREET, N.W. |
| WASHINGTON, D.C. 20036 |
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