Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/31/1989
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Application #:
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07269688
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Filing Dt:
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11/10/1988
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Inventors:
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TOSHIAKI OGAWA, NOBUO FUJIWARA, KENJI KAWAI, TERUO SHIBANO, HIROSHI MORITA et al
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Title:
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SEMICONDUCTOR WAFER TREATING APPARATUS UTILIZING A PLASMA
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| 2-3, MARUNOUCHI 2-CHOME, CHIYODA-KU |
| TOKYO, JAPAN |
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| LEYDIG, VOIT & MAYER |
| 655 FIFTEENTH STREET, N.W. |
| SUITE 520 |
| WASHINGTON, DC 20005 |
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