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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
02/06/1990
Application #:
07252525
Filing Dt:
10/03/1988
Inventors:
TSUTOMU MURAKAMI, MASAHIRO KANAI
Title:
APPARATUS FOR FORMING FUNCTIONAL DEPOSITED FILM BY MICROWAVE PLASMA CVD PROCESS
Assignment: 1
Reel/Frame:
004957/0787Recorded: 10/03/1988Pages: 1
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST.
Assignors:
Exec Dt:
09/01/1988
Exec Dt:
09/01/1988
Assignee:
3-30-2 SHIMOMARUKO, OHTA-KU
TOKYO, JAPAN
Correspondent:
FITZPATRICK, CELLA, HARPER AND SCINTO
277 PARK AVENUE
NEW YORK, NY 10172

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