Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/27/1990
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Application #:
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07307312
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Filing Dt:
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02/07/1989
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Inventors:
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MORITO MATSUOKA, KEN'ICHI ONO
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Title:
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THIN FILM FORMING APPARATUS AND ION SOURCE UTILIZING SPUTTERING WITH MICROWAVE PLASMA
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| NO. 1-6, UCHISAIWAI-CHO 1-CHOME, CHIYODA-KU |
| TOKYO, JAPAN 100 |
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| CUSHMAN, DARBY & CUSHMAN |
| ELEVENTH FLOOR |
| 1615 L ST. N.W. |
| WASHINGTON, DC 20036 |
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