Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/10/1990
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Application #:
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07279016
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Filing Dt:
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12/02/1988
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Inventors:
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TOMOAKI ISHIDA, NOBUO FUJIWARA, KENJI KAWAI, KYUSAKU NISHIOKA, MORIAKI AKAZAWA et al
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Title:
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SEMICONDUCTOR WAFER TREATING DEVICE UTILIZING ECR PLASMA
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| 2-3, MARUNOUCHI 2-CHOME, CHIYODA-KU |
| TOKYO, JAPAN |
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| LEYDIG, VOIT & MAYER |
| 655 FIFTEENTH STREET, N.W. |
| SUITE 520 |
| WASHINGTON, DC 20005 |
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