Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/11/1990
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Application #:
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07242755
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Filing Dt:
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09/09/1988
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Inventor:
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MEHRDAD M. MOSLEHI
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Title:
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METHOD AND APPARATUS FOR REAL-TIME WAFER TEMPERATURE MEASUREMENT USING INFRARED PYROMETRY IN ADVANCED LAMP-HEATED RAPID THERMAL PROCESSORS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| 13500 NORTH CENTRAL EXPRESSWAY |
| DALLAS, TEXAS 75265 |
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| TEXAS INSTRUMENTS INCORPORATED |
| P. O. BOX 655474, M/S 219 |
| DALLAS, TX 75265 |
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