Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/27/1990
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Application #:
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07406539
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Filing Dt:
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09/13/1989
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Inventors:
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KAZUMITSU NAKAMURA, YUKIO YOSHINARI
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Title:
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ELECTRON BEAM LITHOGRAPHY APPARATUS HAVING EXTERNAL MAGNETIC FIELD CORRECTING DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| 6, KANDA SURUGADAI 4-CHOME, CHIYODA-KU, |
| TOKYO 101, JAPAN |
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| ANTONELLI, TERRY & STOUT, KRAUS |
| SUITE 600 |
| 1919 PENN. AVE. N.W. |
| WASHINGTON, DC 20006 |
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