Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/25/1990
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Application #:
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07326352
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Filing Dt:
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03/21/1989
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Inventors:
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OTTO KOBLINGER, REINHOLD MUHL, HANS-JOACHIM TRUMPP
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Title:
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METHOD OF PRODUCING INTEGRATED SEMICONDUCTOR STRUCTURES COMPRISING FIELD-EFFECT TRANSISTORS WITH CHANNEL LENGTHS IN THE SUBMICRON RANGE USING A THREE-LAYER RESIST SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| WILLIAM D. SABO |
| IBM CORPORATION |
| INTELLECTUAL PROPERTY LAW DEPT. |
| 915 BUILDING 972-2 |
| ESSEX JUNCTION, VT 05452 |
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