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Patent Assignment Abstract of Title

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Total Assignments: 2

Patent #:	5000682	Issue Dt:	03/19/1991	Application #:	07467937	Filing Dt:	01/22/1990
Inventors:	DONALD W. HEIDT, STEVE THOMPSON, WORM LUND, RAYMON F. THOMPSON, LARRY M. BEASLEY
Title:	VERTICAL THERMAL PROCESSOR FOR SEMICONDUCTOR WAFERS

Assignment: 1

Reel/Frame:

005227/0628

Recorded: 01/22/1990

Pages: 6

Conveyance:

ASSIGNMENT OF ASSIGNORS INTEREST.

Assignors:

HEIDT, DONALD W.

Exec Dt:

12/21/1989

THOMPSON, STEVE

Exec Dt:

11/27/1989

LUND, WORM

Exec Dt:

01/02/1990

THOMPSON, RAYMON F.

Exec Dt:

01/01/1990

BEASLEY, LARRY M.

Exec Dt:

12/08/1989

Assignee:

SEMITHERM, A CORP. OF MONTANA

655 WEST RESERVE DRIVE

KALISPELL, MONTANA 59901

Correspondent:

WELLS, ST. JOHN & ROBERTS

W. 601 MAIN AVENUE

SUITE 815

SPOKANE, WA 99201-0679

Assignment: 2

Reel/Frame:

008040/0296

Recorded: 07/19/1996

Pages: 3

Conveyance:

MERGER (SEE DOCUMENT FOR DETAILS).

Assignor:

SEMITHERM, INC.

Exec Dt:

01/31/1995

Assignee:

SEMITOOL, INC.

P.O. BOX 7010

KALISPELL, MONTANA 59904

Correspondent:

WELLS, ST. JOHN, ROBERTS, ET AL.

RANDY A. GREGORY

601 W. FIRST AVENUE

SUITE 1300

SPOKANE, WA 99204-0317

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