Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/19/1991
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Application #:
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07242175
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Filing Dt:
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09/09/1988
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Inventors:
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SHIGEKI HIRASAWA, TAKUJI TORII, TOMOJI WATANABE, TOSHIHIRO KOMATSU, KAZUO HONMA et al
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Title:
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APPARATUS AND METHOD FOR PERFORMING HEAT TREATMENT ON SEMICONDUCTOR WAFERS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| MELVIN KRAUS |
| ANTONELLI, TERRY & WANDS |
| 1919 PENNSYLVANIA AVENUE, N.W. |
| STE. 600 |
| WASHINGTON, DC 20006 |
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