Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/21/1991
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Application #:
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07320643
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Filing Dt:
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11/30/1988
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Inventors:
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YASUKAZU MASE, MASAHIRO ABE, OSAMU HIRATA
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Title:
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METHOD OF DETERMINING END OF CLEANING OF SEMICONDUCTOR MANUFACTURING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| 72, HORIKAWA-CHO, SAIWAI-KU |
| KAWASAKI-SHI, KANAGAWA-KEN 210, JAPAN |
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| FINNEGAN, HENDERSON, FARABOW, |
| GARRETT AND DUNNER |
| 1775 K STREET, N.W. |
| WASHINGTON, DC 20006 |
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