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Patent Assignment Abstract of Title

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Total Assignments: 2

Patent #:	5028955	Issue Dt:	07/02/1991	Application #:	07480005	Filing Dt:	02/14/1990
Inventors:	YASUSHI HAYASHIDA, NORIYUKI ANAI, KEISUKE SHIGAKI, OSAMU HIRAKAWA, MASAMI AKIMOTO et al
Title:	EXPOSURE APPARATUS

Assignment: 1

Reel/Frame:

005678/0466

Recorded: 04/25/1991

Pages: 3

Conveyance:

ASSIGNMENT OF ASSIGNORS INTEREST.

Assignors:

HAYASHIDA, YASUSHI

Exec Dt:

01/30/1990

ANAI, NORIYUKI

Exec Dt:

01/30/1990

HIRAKAWA, OSAMU

Exec Dt:

01/30/1990

AKIMOTO, MASAMI

Exec Dt:

01/30/1990

SAKAMOTO, YASUHIRO

Exec Dt:

01/30/1990

SHIGAKI, KEISUKE

Exec Dt:

01/30/1990

MORIYAMA, MASASHI

Exec Dt:

02/05/1991

Assignees:

TOKYO ELECTRON LIMITED, 1-26-2, NISHI-SHINJUKU, SHINJUKU-KU, TOKYO, JAPAN A CORP. OF JAPAN

JAPAN

TOKYO ELECTRON KYUSHU LIMITED, 2655 TSUKURE, KIKUYO-MACHI, KIKUCHI-GUN, KUMAMOTO 869-11, JAPAN A CORP. OF JAPAN

JAPAN

Correspondent:

OBLON, SPIVAK, MC CLELLAND,

MAIER AND NEUSTADT

FOURTH FLOOR

1755 JEFFERSON DAVIS HWY.,

ARLINGTON, VA 22202

Assignment: 2

Reel/Frame:

009453/0220

Recorded: 09/10/1998

Pages: 6

Conveyance:

ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Assignor:

TOKYO ELECTRON KYUSHU LIMITED

Exec Dt:

05/13/1998

Assignee:

TOKYO ELECTRON LIMITED

3-6 AKASAKA 5-CHOME

MINATO-KU, TOKYO 107, JAPAN

Correspondent:

OBLON, SPIVAK, MCCLELLAND, ET AL.

MARVIN J. SPIVAK

FOURTH FLOOR

1755 JEFFERS0N DAVIS HIGHWAY

ARLINGTON, VA 22202

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