Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/20/1991
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Application #:
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07403821
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Filing Dt:
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09/07/1989
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Inventors:
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SHUNPEI YAMAZAKI, MITSUNORI TSUCHIYA, SHIGENORI HAYASHI, NAOKI HIROSE, NORIYA ISHIDA et al
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Title:
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PLASMA PROCESSING METHOD AND APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| 398, HASE, ATSUGI-SHI, |
| KANAGAWA-KEN, 243, JAPAN |
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| SIXBEY, FRIEDMAN, LEEDOM & FERGUSON |
| 2010 CORPORATE RIDGE, STE. 600 |
| MC LEAN, VA 22102 |
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