Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/10/1991
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Application #:
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07582083
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Filing Dt:
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09/14/1990
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Inventors:
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HIROYUKI ITOH, KENICHI HIRANE
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Title:
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ELECTRON BEAM LITHOGRAPHY APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| ANTONELLI, TERRY, STOUT & KRAUS |
| STE. 600 |
| 1919 PENNSYLVANIA AVENUE, N.W. |
| WASHINGTON, DC 20006 |
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