Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/28/1992
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Application #:
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07511664
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Filing Dt:
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04/20/1990
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Inventors:
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ANTHONY G. DEWEY, WILFRIED LENTH, DANIEL RUGAR
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Title:
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FOCUS-ERROR DETECTION USING PRISM-ENHANCED SPOT SIZE MONITORING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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DOUGLAS R. MILLETT |
IBM CORP., 5600 COTTLE ROAD (951/029), |
SAN JOSE, CA 95193 |
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