Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/04/1992
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Application #:
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07526220
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Filing Dt:
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05/21/1990
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Inventor:
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ROBERT J. STEGER
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Title:
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PLASMA ETCH APPARATUS WITH CONDUCTIVE COATING ON INNER METAL SURFACES OF CHAMBER TO PROVIDE PROTECTION FROM CHEMICAL CORROSION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| 3050 BOWERS AVENUE, A CORP OF DE |
| SANTA CLARA, CALIFORNIA 95054 |
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| PAUL L. HICKMAN |
| LEGAL AFFAIRS DEPARTMENT |
| APPLIED MATERIALS, INC. |
| 3050 BOWERS AVENUE |
| SANTA CLARA, CA 95054 |
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