Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/11/1992
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Application #:
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07538696
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Filing Dt:
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06/18/1990
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Inventors:
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TSUTOMU TSUKADA, ETSUO WANI, KOKI YASUDA
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Title:
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DRY ETCHING APPARATUS AND METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| 8-1, YOTSUYA 5-CHOME, FUCHU-SHI, A CORP. OF JAPAN |
| TOKYO, JAPAN 183 |
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| MORRIS LISS |
| POLLOCK, VANDE SANDE & PRIDDY |
| 1990 M STREET, N.W., SUITE 800 |
| WASHINGTON, D.C. 20036 |
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