Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/17/1992
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Application #:
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07563441
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Filing Dt:
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08/07/1990
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Inventors:
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HIROAKI WAKABAYASHI, OSAMU SUGA, YOSHINORI NAKAYAMA, SHINJI OKAZAKI
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Title:
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ELECTRON BEAM LITHOGRAPHY SYSTEM AND METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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6, KANDA SURUGADAI 4-CHOME, CHIYODA-KU |
TOKYO, JAPAN |
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PATRICK R. ROCHE |
1100 SUPERIOR AVE., SUITE 700 |
CLEVELAND OH 44114-2518 |
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