Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/07/1992
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Application #:
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07503005
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Filing Dt:
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04/02/1990
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Inventor:
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MEHRDAD M. MOSLEHI
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Title:
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ELECTROMAGNETIC WAVE MEASUREMENT OF CONDUCTIVE LAYERS OF A SEMICONDUCT SEMICONDUCTOR WAFER DURING PROCESSING IN A FABRICATION CHAMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| DOUGLAS A. SORENSEN |
| TEXAS INSTRUMENTS INCORPORATED |
| P.O. BOX 655474 |
| M/S 219 |
| DALLAS, TX 75265 |
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